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The probe current was 8 X 10-13 A and a W hairpin filament and conventional oil diffusion pump system were employed. Broers(S) has reported a minimum probe diameter of 30-50 A at 24 kV using a LaBs electron gun. The beam current was approximately 10-11 A and a contamination-free ion-pumped vacuum system was employed. It is of interest to calculate the importance of the various aberrations de. ds, and dd on the final spot size of the electron probe. As an example, one can consider the various probe diameters d, ds, and dd that, according to equation (15), give a value of dmin of 50 A.

G. Burke, S. Troutman, G. G. , and E. W. White, in Scanning Electron Microscopy/1974, IITRI, Chicago, Illinois (1974), p. 121. 24. R. F. Herzog, B. L. Lewis, and T. E. Everhart, in Scanning Electron Microscopy/ 1974, IITRI, Chicago, Illinois (1974), p. 175. 25. A. 91. 26. A. R. Dinnes, in Scanning Electron Microscopy: Systems and Applications 1973, Conference Series 18, Institute of Physics, London (1973), p. 76. 27. R. Fitzgerald, K. Keil, and K. F. J. Heinrich, Science, 159, 528 (1968). 28. J.

Since the magnetic field H varies as a function of position through the electromagnetic lens, the values of Hr and Hz also vary. In Figure 6(b), a plot of the magnetic field intensity Hz parallel to the electron optical axis is given. The maximum magnetic field is obtained in the center of the gap. Hr, which is the radial magnetic field, has a zero component when the magnetic field is parallel to the z axis, that is, in the center of the gap of the electromagnetic lens, and has a maximum on either side of the center of the gap.

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Analysis by Blatter C.


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